Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam
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通过聚焦离子束调整频率失配为 3 ppm 的四质量谐振器
DOI：
10.1109/jmems.2021.3065720
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发表时间：
2021-06
影响因子：
2.7
通讯作者：
Jianlin Chen;T. Tsukamoto;Shuji Tanaka
中科院分区：
文献类型：
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作者：
Jianlin Chen;T. Tsukamoto;Shuji Tanaka
报道了一种利用聚焦离子束（FIB）刻蚀技术对四质量陀螺（QMG）谐振腔进行频率微调的方法。通过理论分析和数值计算，研究了悬架刚度、耦合刚度和质量扰动对反相模态谐振频率的影响，验证了悬架刚度微调的有效性和优越性。进一步考虑了悬架刚度不匹配引起的非对称性对系统频率和品质因数的影响。通过有限元分析，研究了悬架弹簧的几何形状与谐振频率之间的关系。提出的微调证明了使用标准的SOI工艺制造的QMG器件。谐振频率失配最初约为2810 ppm。在对悬簧进行FIB微调后，在± 2K的环境温度变化范围内，频率失配减小到3ppm，不确定度不超过75ppm。在100，000至90，000的修整轴中观察到Q因子的轻微变化。
This paper reports a frequency trimming method for a resonator used in a quad-mass gyroscopes (QMG) by focused ion beam (FIB) etching. The effects of the suspension stiffness, coupling stiffness and mass perturbations on the anti-phase mode resonant frequency were studied theoretically and numerically, proving the effectiveness and merit of the suspension stiffness trimming. The asymmetry caused by the suspension stiffness mismatch was further considered and its effects on frequency and Q-factor were investigated. Then the relationship between the trimming geometry of the suspension springs and the resonant frequency was studied by finite element analysis (FEA). The proposed trimming was demonstrated by using a QMG device fabricated by a standard SOI process. The resonant frequency mismatch was initially about 2810 ppm. After the proposed FIB trimming on the suspension springs, the frequency mismatch decreased to be as small as 3 ppm and the uncertainties do not exceed 75 ppm in the variation of ambient temperature between ±2 K. A slight change of Q-factor was observed in the trimmed axis from 100,000 to 90,000.