Fabrication and characterization of a micromachined 5 mm inductively coupled plasma generator
Fabrication and characterization of a micromachined 5 mm inductively coupled plasma generator
复制标题
微机械 5 mm 电感耦合等离子体发生器的制造和表征
DOI：
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
Y. Yin
中科院分区：
文献类型：
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作者：
J. Hopwood;O. Minayeva;Y. Yin
微加工等离子体发生器产生的电子温度和离子密度的特点是在氩气和空气。等离子体发生器通过将450 MHz射频功率感应耦合到小（10 mm直径）真空室中来维持放电。电感耦合等离子体源是通过电镀一个平面螺旋电感和两个叉指电容在玻璃晶片上进行表面微机械加工的。可以使用0.1和10托之间的气压和0.3和3W之间的射频功率来维持等离子体。在这个功率范围内，离子密度从1010 cm−3增加到1011 cm−3。当压力从0.1 Torr增加到1 Torr时，电子温度从4 eV降低到2 eV。
The electron temperature and ion density produced by a microfabricated plasma generator are characterized in both argon gas and air. The plasma generator sustains a discharge by inductively coupling 450 MHz rf power into a small (10 mm diameter) vacuum chamber. The inductively coupled plasma source is surface micromachined on a glass wafer by electroplating a planar spiral inductor and two interdigitated capacitors. A plasma can be sustained using gas pressures between 0.1 and 10 Torr and rf powers between 0.3 and 3 W. The ion density increases from 1010 to 1011 cm−3 over this range of power. The electron temperature decreases from 4 to 2 eV as the pressure increases from 0.1 to 1 Torr.