Metal-armouring for shock protection of MEMS
Metal-armouring for shock protection of MEMS
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DOI：
10.1016/j.sna.2013.11.008
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发表时间：
2014-08-15
影响因子：
4.6
通讯作者：
Pike, W. T.
中科院分区：
文献类型：
--
作者：
Delahunty, A. K.;Pike, W. T.
本文展示了MEMS悬架的冲击保护的新概念：在悬架的侧壁内加入焊料以产生保护性金属装甲。这在悬架行程的极端情况下提供了焊锡接触，大大增加了抗冲击性。模型悬架系统采用深度反应离子蚀刻（DRIE）制造，并在高达6000 x g的加速度水平下在跌落试验台上进行了冲击测试。事实证明，焊接装甲吸收了90%的碰撞动能，并将MEMS悬架的抗冲击性提高了一倍。(C) 2013年Elsevier B.V.出版
This paper demonstrates a novel concept for the shock protection of MEMS suspensions: solder is incorporated within the sidewalls of the suspension to produce protective metal armouring. This provides solder-solder contact at the extremes of the suspension travel, greatly increasing the shock resistance. Model suspension systems were fabricated using deep reactive ion etching (DRIE) and shock tested in a drop-test rig at acceleration levels up to 6000 x g. The solder armour proved to absorb 90% of the collision kinetic energy and double the shock resistance of the MEMS suspension. (C) 2013 Published by Elsevier B.V.