New fit formulae for the sputtering yield
New fit formulae for the sputtering yield
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DOI：
10.1016/s0022-3115(03)00192-2
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发表时间：
2003-08-01
影响因子：
3.1
通讯作者：
Preuss, R
中科院分区：
文献类型：
--
作者：
Eckstein, W;Preuss, R
对溅射成品率的能量依赖性和角依赖性提出了新的拟合公式。虽然它们是经验的，但它们能更好地描述产率数据，特别是在能量依赖的阈值附近和角依赖的低质量比下。应用新的能量依赖公式确定了不同质量比的阈值能量。(C) 2003 Elsevier B.V.版权所有
New fit formulae for the energy and angular dependencies of the sputtering yield are proposed. Though they are empirical they give a better description of yield data, especially near the threshold for the energy dependence and at low mass ratios for the angular dependence. The new formula for the energy dependence was applied to determine threshold energies for different mass ratios. (C) 2003 Elsevier B.V. All rights reserved.