Spectroscopic temperature measurements in a microwave discharge
Spectroscopic temperature measurements in a microwave discharge
复制标题
微波放电中的光谱温度测量
DOI：
--
复制
发表时间：
1996
期刊：
影响因子：
--
通讯作者：
P Leprince
中科院分区：
文献类型：
--
作者：
L Tomasini;A Rousseau;G Gousset;P Leprince
我们报道了在低气压氢微波等离子体中的温度测量。同时测定了H和O的平移温度(利用多普勒展宽)以及F的转动温度。首次证明了激发态的转动温度与中性粒子的平移温度不平衡。然后，利用高分辨率傅里叶变换光谱仪，我们证明了氢原子的动力学温度高于氢原子的动力学温度。这一结果是通过考虑电子碰撞解离分子和管壁产生的热H原子的驰豫机制来解释的。
We report temperature measurements in a low-pressure hydrogen microwave plasma. Translational temperatures both of H and of (using Doppler broadening), as well as the rotational temperature of , are simultaneously determined. It is first shown that the rotational temperature of the excited state is not in equilibrium with the translational temperatures of the neutral particles. Then, using a high-resolution Fourier transform spectrometer, we show that the H atom kinetic temperature is higher than the one. This result is interpreted in considering the mechanisms of relaxation of the hot H atoms, produced by electron impact dissociation of , in the molecules and on the tube walls.