Micromachined Thick Mesh Filters for Millimeter-Wave and Terahertz Applications
Micromachined Thick Mesh Filters for Millimeter-Wave and Terahertz Applications
复制标题
DOI：
10.1109/tthz.2013.2296564
复制
发表时间：
2014-01
影响因子：
3.2
通讯作者：
Yi Wang;Bin Yang;Yingtao Tian;R. Donnan;M. Lancaster
中科院分区：
文献类型：
--
作者：
Yi Wang;Bin Yang;Yingtao Tian;R. Donnan;M. Lancaster
本文介绍了几个独立的带通网孔滤波器制作使用SU-8为基础的微机械加工技术。SU 8能够增加的滤波器的重要几何特征是十字形微加工槽的厚度。这是它宽度的五倍。该厚度提供了对谐振特性的额外程度的控制。大的厚度不仅加强了结构，而且提高了谐振品质因数（Q因子）。一个0.3毫米厚，单层，网状滤波器谐振在300 GHz的设计和制造，其性能验证。实测Q值为16.3，插入损耗为0.98 dB。两个多层过滤器结构也已被证明。第一种是两个单网孔过滤器的堆叠结构，产生双倍厚度，其实现了27的进一步增加的Q因子。这比薄网过滤器高六倍以上。第二多层滤波器是形成双极滤波器的电磁耦合结构。根据实验和仿真结果讨论了耦合特性。这些厚网滤波器可用于毫米波和太赫兹频率的传感和材料表征。
This paper presents several freestanding bandpass mesh filters fabricated using an SU-8-based micromachining technique. The important geometric feature of the filters, which SU8 is able to increase, is the thickness of the cross-shaped micromachined slots. This is five times its width. This thickness offers an extra degree of control over the resonance characteristics. The large thickness not only strengthens the structures, but also enhances the resonance quality factor ( Q-factor). A 0.3-mm-thick, single-layer, mesh filter resonant at 300 GHz has been designed and fabricated and its performance verified. The measured Q-factor is 16.3 and the insertion loss is 0.98 dB. Two multi-layer filter structures have also been demonstrated. The first one is a stacked structure of two single mesh filters producing a double thickness, which achieved a further increased Q-factor of 27. This is over six times higher than a thin mesh filter. The second multilayer filter is an electromagnetically coupled structure forming a two-pole filter. The coupling characteristics are discussed based on experimental and simulation results. These thick mesh filters can potentially be used for sensing and material characterization at millimeter-wave and terahertz frequencies.