Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe
Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe
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DOI：
10.1016/j.sna.2009.08.013
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发表时间：
2009-10-01
影响因子：
4.6
通讯作者：
Yang, Yunhai
中科院分区：
文献类型：
--
作者：
Ju, Bing-Feng;Chen, Yuan-Liu;Yang, Yunhai
在系统研究电解抛光工艺的基础上，提出了一种改进的钨STM探针制作工艺。探讨了脉冲电流和电解液浓度的合理组合，以消除杂质，获得具有超光滑表面的高质量探针。为了实现针尖尖锐、高深宽比结构的探针，提出了一种优化的钨丝在电解液中的浸入深度。提出了一种确定电解抛光过程中断电时刻的控制策略，该策略将有助于指数轮廓和超尖探针的制造。实验证明，该工艺具有稳定触针轮廓STM探针制造的优势，其针尖半径一般为30 nm，成品率高达85%。(C)2009爱思唯尔有限公司版权所有。
Based on the systematic study of electropolishing process, an improved tungsten STM probe fabrication technique has been presented. The proper combination of pulse current and the electrolyte concentration is explored for the elimination of impurities and achieves high quality probes with ultra-smooth surfaces. An optimized immersion depth of tungsten wire in electrolyte is proposed for the purpose of realizing the probe with sharp apex as well as high aspect ratio structure. A control strategy for determining the power-off instant during the procedure of electropolishing is developed which will facilitate the fabrication of probe with exponential contour as well as ultrasharp tip. The proposed technique and process are experimentally confirmed to have advantages for the STM probe fabrication of the stabilized stylus Contour, typically with apex radius of 30 nm and the yield rate reaches as high as 85%. (C) 2009 Elsevier B.V. All rights reserved.