Recent advances in focused ion beam technology and applications
Recent advances in focused ion beam technology and applications
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DOI：
10.1557/mrs.2014.52
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发表时间：
2014-04-01
期刊：
影响因子：
5
通讯作者：
Giannuzzi, Lucille A.
中科院分区：
文献类型：
--
作者：
Bassim, Nabil;Scott, Keana;Giannuzzi, Lucille A.
聚焦离子束显微镜是非常通用和强大的材料研究仪器。当这些显微镜与扫描电子显微镜结合在一起时，为新的样品成像、切片、样品制备、三维(3D)纳米到宏观尺度层析成像和高分辨率快速成型提供了机会。以纳米级分辨率以特定位置的方式表征和创建材料特征的能力为许多材料系统提供了关键的见解。新仪器的出现，如涵盖越来越多元素周期表的新离子源，用于敏感材料分析的低温样品保持器等现场测试工具，用于3D结构、化学和离子对比表征的新型探测器配置，以及强大而通用的过程自动化能力，对于许多材料研究领域来说是一个令人兴奋的发展。
Focused ion beam microscopes are extremely versatile and powerful instruments for materials research. These microscopes, when coupled in a system with a scanning electron microscope, offer the opportunity for novel sample imaging, sectioning, specimen preparation, three-dimensional (3D) nano- to macroscale tomography, and high resolution rapid prototyping. The ability to characterize and create materials features in a site-specific manner at nanoscale resolution has provided key insights into many materials systems. The advent of novel instrumentation, such as new ion sources that encompass more and more of the periodic table, in situ test harnesses such as cryogenic sample holders for sensitive material analyses, novel detector configurations for 3D structural, chemical, and ion contrast characterization, and robust and versatile process automation capabilities, is an exciting development for many fields of materials research.