Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators
Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators
复制标题
表面微机械热执行器的循环疲劳测试
DOI：
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发表时间：
1998
期刊：
影响因子：
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通讯作者：
R. Muller
中科院分区：
文献类型：
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作者：
R. Conant;R. Muller
对表面微机械加工的U型热致动器进行了长期试验。在低于8 mW（12 μm位移）的功率水平下运行的致动器在660 Hz下连续运行超过1亿次循环，故障定义为位移减少20%的点。在高于8mW操作的致动器中已经观察到塑性变形，并且已经示出塑性变形与操作期间遇到的高温相关联。致动器的故障率取决于致动器在操作期间所遇到的高温下的总时间，而不是取决于致动循环的数量。本文为MEMS设计人员提供了一个指南，显示了热致动器的寿命作为其驱动功率的函数。
Long-term testing of surface-micromachincd U-shaped thermal actuators has been carried out. Actuators operated at power levels lower than 8 mW (12 μm of displacement) operated satisfactorally for more than 100 million cycles at 660 Hz, with a failure defined as the point at which the displacement decreases by 20%. Plastic deformation had been observed in actuators operated above 8 mW, and the plastic deformation has been shown to be associated with the high temperatures encountered during operation. The failure rate of the actuators is dependent on the total time the actuators are at the elevated temperatures encountered during operation, rather than on the number of actuation cycles. This paper provides a guide for MEMS designers that shows the lifetime of a thermal actuator as a function of its drive power.