Fabrication of free-standing subwavelength metal-insulator-metal gratings using high aspect ratio nanoimprint techniques
Fabrication of free-standing subwavelength metal-insulator-metal gratings using high aspect ratio nanoimprint techniques
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使用高纵横比纳米压印技术制造独立式亚波长金属-绝缘体-金属光栅
DOI:
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发表时间:
2016
期刊:
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通讯作者:
and Kazuhiro Takahashi
中科院分区:
文献类型:
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作者:
H. Honma;Masato Mitsudome;Shintaro Itoh;Makoto Ishida;Kazuaki Sawada;and Kazuhiro Takahashi