Hyperthermal hydrogen induced cross-linking and fabrication of nano-wrinkle patterns in ultrathin polymer films

Hyperthermal hydrogen induced cross-linking and fabrication of nano-wrinkle patterns in ultrathin polymer films
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DOI:
10.1016/j.surfcoat.2014.11.013
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发表时间:
2015-01
影响因子:
5.4
通讯作者:
Liangliang He;Changyu Tang;Xingwang Xu;Peng Jiang;W. Lau;Feng Chen;Q. Fu
Liangliang He;Changyu Tang;Xingwang Xu;Peng Jiang;W. Lau;Feng Chen;Q. Fu
中科院分区:
材料科学1区
文献类型:
--
作者:
Liangliang He;Changyu Tang;Xingwang Xu;Peng Jiang;W. Lau;Feng Chen;Q. Fu

文献摘要

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本文提出了一种高效、简单的纳米尺度褶皱图案的制作和调控方法。通过使用高温氢致交联(HHIC)方法在20纳米内交联双分子层聚合物膜的表面来产生刚性膜,然后将双层加热到聚合物的玻璃化转变温度以上,然后淬火到室温。以这种方式,制备波长范围为150至300 nm的皱纹图案。观察到了单点(凸块)和脊(迷宫)之间的形态过渡。系统地研究了褶皱图案的形成与原始薄膜厚度、HHIC处理时间、退火温度和聚合物化学结构的关系。此外,纳米图案化的硅晶片被用作模板,以创建多尺度,各向异性的皱纹图案。
This paper presents an efficient and simple processing method for the fabrication and regulation of nano-scale wrinkle patterns. The stiff film is created through cross-linking the surface of ultrathin polymer film within twenty nanometers by using the hyperthermal hydrogen induced cross-linking (HHIC) method, and then the bilayer is heated above the glass transition temperature of the polymer before quenched to room temperature. In this way, wrinkle patterns with wavelength ranging from 150 to 300 nm are prepared. And a morphology transition between the pattern of single points (convex bumps) and the pattern of ridges (labyrinth) is observed. The formation of wrinkle patterns is systematically investigated as functions of the thickness of original ultrathin film, the time of HHIC treatment, the annealing temperature and the chemical structure of polymers. Furthermore, nano-patterned silicon wafer is used as a template to create multiscale, anisotropic wrinkle patterns.