T.Okuyama,Y.Tomokiyo et.al.: "Analysis of local lattice strains around plate-like oxygen precipitates in CZ-silicon wafers by convergent-beam electron diffraction" Jpn.J.Appl.Phys.36. 3359-3365 (1997)
T.Okuyama,Y.Tomokiyo et.al.: "Analysis of local lattice strains around plate-like oxygen precipitates in CZ-silicon wafers by convergent-beam electron diffraction" Jpn.J.Appl.Phys.36. 3359-3365 (1997)
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T.Okuyama、Y.Tomokiyo 等人:“通过会聚束电子衍射分析 CZ 硅片中板状氧沉淀物周围的局部晶格应变”Jpn.J.Appl.Phys.36。
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