A TE/sub 011+/spl delta// mode sapphire resonator probe for accurate characterization of microwave surface resistance of HTS thin films
A TE/sub 011+/spl delta// mode sapphire resonator probe for accurate characterization of microwave surface resistance of HTS thin films
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DOI：
10.1109/iccs.1994.474261
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发表时间：
1994-11
期刊：
影响因子：
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通讯作者：
Jian Lu;X. Ren;Qishao Zhang
中科院分区：
文献类型：
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作者：
Jian Lu;X. Ren;Qishao Zhang
开发了一种特殊的TE/sub 011+/spl delta//模式蓝宝石谐振器和等效完美导体校准技术，用于在10 GHz和77 K下无损测量单片高温超导薄膜的表面电阻Rs。该谐振器由永久探针和可更换测试样品组成。该探头的 Q 因子大于 280000，对于尺寸等于或大于 /spl phi/28 mm 的被测 HTS 样品，具有良好的样品负载重复性和约 20 /spl mu//spl Omega/ 的灵敏度。校准采用对称配置，呈现零欧姆的等效 Rs，并确保测量的准确性。激光烧蚀和磁溅射制备的YBCO薄膜实测Rs数据小于250/spl mu//spl Omega/。>
A special TE/sub 011+/spl delta// mode sapphire resonator and an equivalent perfect conductor calibration technique were developed to measure the surface resistance Rs of a single piece of HTS thin film non-destructively at 10 GHz and 77 K. The resonator is formed by a permanent probe and a replaceable test sample. The probe has Q-factor greater than 280000-good sample load repeatability and sensitivity about 20 /spl mu//spl Omega/ for HTS samples under test with dimension equal to or greater than /spl phi/28 mm. The calibration employs a symmetric configuration which presents an equivalent Rs of zero ohm and ensures the accuracy of the measurement. The measured Rs data of YBCO thin films made by laser ablation and magnetic sputtering are less than 250 /spl mu//spl Omega/.>