A Scalable Platform for Integrating Horizontal Nanochannels with Known Registries to Microchannels
A Scalable Platform for Integrating Horizontal Nanochannels with Known Registries to Microchannels
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DOI：
10.1021/cm801893z
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发表时间：
2009-01-13
影响因子：
8.6
通讯作者：
Nikoobakht, Babak
中科院分区：
文献类型：
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作者：
Nikoobakht, Babak
当涉及到使用自下而上的化学方法制造纳米器件时，控制纳米器件组装中纳米构建块的位置和物理取向成为具有挑战性的任务。这里，报道了一种原位制备水平纳米通道的策略，它允许控制它们的取向和平均孔径，达到前所未有的类似5-20 nm的范围。利用这种方法，我们选择性地在蓝宝石表面的已知位置制备了平均孔径可控的纳米通道。同样重要的是，纳米通道，无论是单个的还是成组的，都可以光刻的方式寻址，并且可以在不使用任何高分辨率光刻的情况下集成到微通道。该技术使用水平的氧化锌纳米线(NWS)作为牺牲模板，可以制造复杂的微流体和纳米流体平台。通过聚焦离子束制备了纳米线和纳米通道的横截面，并用电子显微镜和能量色散X射线光谱进行了观察。
Controlling the location and physical orientation of nanobuilding blocks in assemblies of nanodevices become challenging tasks when it comes to the use of "bottom-up" chemical approaches for nanodevice fabrication. Here, a strategy is reported for in situ fabrication of horizontal nanochannels, which allows control over their orientation and average pore size to an unprecedented range of similar to 5-20 nm. Using this approach, we selectively fabricated nanochannels with controlled average pore sizes at known positions on a sapphire surface. Equally important, nanochannels, either single or group, are addressable photolithographically and integrable to microchannels without the use of any high resolution lithography. This technique uses horizontal ZnO nanowires (NWs) as a sacrificial template and could provide the capability of fabrication of complex micro- and nanofluidic platforms. Cross-sections of nanowires and nanochannels are prepared via a focused-ion beam and examined by electron microscopy and energy-dispersive X-ray spectroscopy.