Numerical investigation for nano-particle synthesis in an RF inductively coupled plasma
Numerical investigation for nano-particle synthesis in an RF inductively coupled plasma
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DOI：
10.1016/j.tsf.2003.12.020
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发表时间：
2004-06-01
期刊：
影响因子：
2.1
通讯作者：
Nishiyama, H
中科院分区：
文献类型：
--
作者：
Shigeta, M;Watanabe, T;Nishiyama, H
由于等离子体被认为是一种多功能流体，具有高能量密度、化学反应性、外部电磁场的可控性以及可变的传输特性（例如电导率），因此它对于纳米颗粒的合成非常有效。由于射频感应耦合等离子体（RF-ICP）具有多种优点，因此可以通过尾部陡峭的温度梯度轻松合成高纯度的金属和陶瓷超细粉末。在本研究中，通过数值研究阐明了操作条件（例如淬火气体流量和 RF-ICP 反应器的送粉速度）对 At、Ti、Au 和 Pt 纳米金属颗粒的数密度、直径和比表面的影响。对于所有金属，淬火气体流量的增加导致颗粒数密度增加、平均直径减小和比表面增加。粉末进料速度的增加导致平均直径增加但比表面积减小。由于饱和压力和表面张力等材料特性，四种金属的结果彼此明显不同。 (C) 2003 Elsevier B.V. 保留所有权利。
Since plasma is regarded as one of the multifunctional fluids which has high energy density, chemical reactivity, controllability by an external electromagnetic field and variable transport properties such as electrical conductivity, it is considerably effective for the synthesis of nano-particles. Since a radio frequency inductively coupled plasma (RF-ICP) has several advantages, the synthesis of ultrafine powders of metals and ceramics with high purity can be easily achieved by the steep temperature gradients at the tail. In the present study, it is clarified how the number density, diameter and specific surface of the produced nano metal-particles of At, Ti, Au and Pt are influenced by the operating conditions such as the quenching gas flow rate and the powder feed rate of the RF-ICP reactor by numerical investigation. For all the metals, the increase in the quenching gas flow rate results in the increase in the particle number density, the decrease in the mean diameter and the increase in the specific surface. The increase in the powder feed rate causes the increase in the mean diameter but the decrease in the specific surface. The results of four metals are markedly different from each other due to their own material properties of saturation pressure and surface tension. (C) 2003 Elsevier B.V. All rights reserved.