Nanoscale zoom tomography with hard x rays using Kirkpatrick-Baez optics

Nanoscale zoom tomography with hard x rays using Kirkpatrick-Baez optics
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DOI:
10.1063/1.2719653
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发表时间:
2007-04-02
影响因子:
4
通讯作者:
Buffiere, J. -Y.
Buffiere, J. -Y.
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Mokso, R.;Cloetens, P.;Buffiere, J. -Y.

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c 2007 年美国物理研究所。为了克服现有断层扫描技术在空间分辨率和视场方面的限制,基于 Kirkpatrick-Baez 光学器件产生的亚 100 nm 焦点实现了硬 X 射线投影显微镜。将样品设置在焦点下游一小段距离处,并在中等分辨率检测器上记录具有可变放大倍率的菲涅尔衍射图案。虽然该方法需要特定的相位恢复程序和对镜面缺陷的校正,但它允许无损地放大大体积样本。在局部断层扫描模式下,在铝合金上演示了定量三维纳米级显微镜。 (c) 2007 年美国物理研究所。
c 2007 American Institute of Physics. To overcome the limitations in terms of spatial resolution and field of view of existing tomography techniques, a hard x-ray projection microscope is realized based on the sub-100-nm focus produced by Kirkpatrick-Baez optics. The sample is set at a small distance downstream of the focus and Fresnel diffraction patterns with variable magnification are recorded on a medium-resolution detector. While the approach requires a specific phase retrieval procedure and correction for mirror imperfections, it allows zooming nondestructively into bulky samples. Quantitative three-dimensional nanoscale microscopy is demonstrated on an aluminum alloy in local tomography mode. (c) 2007 American Institute of Physics.