Lens aberration compensation in interference microscopy
Lens aberration compensation in interference microscopy
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DOI：
10.1016/j.optlaseng.2020.106015
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发表时间：
2020-05
影响因子：
4.6
通讯作者：
Rong Su;Matthew Thomas;Mingyu Liu;J. Drs;Y. Bellouard;C. Pruss;J. Coupland;R. Leach
中科院分区：
文献类型：
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作者：
Rong Su;Matthew Thomas;Mingyu Liu;J. Drs;Y. Bellouard;C. Pruss;J. Coupland;R. Leach
以复杂几何形状的功能表面为特征的产品的出现，如消费电子产品中的自由曲面光学、增强现实和虚拟现实，需要高精度的非接触式表面测量。然而，光学法和触控笔法的测量结果往往存在较大的差异，特别是对于复杂的表面。对于干涉显微镜，例如相干扫描干涉测量，三维表面传递函数提供了有关仪器空间频率通带和可能导致测量误差的透镜像差的信息。表征和相位反演的仪器的三维表面传递函数产生一个反滤波器，可以直接应用到三维条纹数据。反滤波可以减少测量误差，而无需使用任何数据处理或需要任何表面的先验知识。我们提出了几个自由曲面和增材制造表面测量的表征和校正过程的实验验证。校正后的相干扫描干涉测量结果与可追踪的触控笔测量结果一致，达到10纳米的量级。
Emergence of products that feature functional surfaces with complex geometries, such as freeform optics in consumer electronics and augmented reality and virtual reality, requires high-accuracy non-contact surface measurement. However, large discrepancies are often observed between the measurement results of optical methods and contact stylus methods, especially for complex surfaces. For interference microscopy, such as coherence scanning interferometry, the three-dimensional surface transfer function provides information about the instrument spatial frequency passband and about lens aberrations that can result in measurement errors. Characterisation and phase inversion of the instrument's three-dimensional surface transfer function yields an inverse filter that can be applied directly to the three-dimensional fringe data. The inverse filtering is shown to reduce measurement errors without using any data processing or requiring any a priori knowledge of the surface. We present an experimental verification of the characterisation and correction process for measurements of several freeform surfaces and an additive manufactured surface. Corrected coherence scanning interferometry measurements agree with traceable contact stylus measurements to the order of 10 nm.