Vertically-shaped tunable MEMS resonators
Vertically-shaped tunable MEMS resonators
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DOI：
10.1109/jmems.2007.910251
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发表时间：
2008-02-01
影响因子：
2.7
通讯作者：
Ghodssi, Reza
中科院分区：
文献类型：
--
作者：
Morgan, Brian;Ghodssi, Reza
我们报告了可调谐梳状谐振器的开发，该谐振器使用垂直形状的梳齿作为静电弹簧。通过将我们的设计修改限制在垂直尺寸上，可以在不增加设备占地面积的情况下实现可调性。三维有限元分析用于评估几何形状和设计对静电弹簧强度和线性的影响。所有结构部件均采用灰度技术制造，同时使用单个光刻和干蚀刻步骤定义所有垂直水平。随后的测试通过创建高达 1.06 N/m（70 V 时）和 1.45 N/m（120 V 时）的静电弹簧常数实现了双向谐振频率调谐 (> 17%)。虽然当前的谐振装置在大振荡幅度（> 10μm）下显示出非线性刚度系数的证据，但引入并模拟了多种设计选项作为潜在的解决方案。
We report the development of tunable comb-resonators that use vertically-shaped comb-fingers as electrostatic springs. By restricting our design modifications to the vertical dimension, the tunability is achieved without increasing the device footprint. Three-dimensional finite element analysis was used to evaluate the effects of geometry and design on electrostatic spring strength and linearity. All structural components were fabricated using gray-scale technology, simultaneously defining all vertical levels using a single lithography and dry-etching step. Subsequent testing achieved bidirectional resonant frequency tuning (> 17%) through the creation of electrostatic spring constants as high as 1.06 N/m (at 70 V) and 1.45 N/m (at 120 V). While the current resonant devices show evidence of nonlinear stiffness coefficients at large oscillation amplitudes (> 10 mu m), multiple design options are introduced and simulated as potential solutions.