Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials
Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials
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DOI：
10.1364/oe.17.002143
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发表时间：
2009-02-16
期刊：
影响因子：
3.8
通讯作者：
Chichkov, Boris N.
中科院分区：
文献类型：
--
作者：
Ovsianikov, Aleksandr;Xiao Shizhou;Chichkov, Boris N.
研究了通过双光子聚合微结构的锆基溶胶-凝胶复合材料的收缩行为，并提出了一种简单、直接的方法来评估收缩率。结果表明，体积减小与微加工所用的平均激光功率（辐照剂量）直接相关，并成为聚合阈值附近的一个关键问题。事实证明，这种收缩可以有益地用于提高结构分辨率。通过控制体积减小制造的光子晶体纳米结构中阻带的存在证明了这一点。远高于聚合阈值，所研究的材料表现出非常低的收缩率。因此，不需要额外的努力来预补偿变形和提高结构稳定性。 (C) 2009 美国光学学会
An investigation of the shrinking behaviour of a zirconium-based sol-gel composite micro-structured by two-photon polymerization is presented and a simple, straightforward methodology allowing the evaluation of shrinkage is suggested. It is shown that volume reduction is directly related to the average laser power (irradiation dose) used for the microfabrication and becomes a critical issue near the polymerization threshold. It is demonstrated that this shrinkage can be employed beneficially to improve the structural resolution. This is demonstrated by the presence of stopbands in the photonic crystal nanostructures fabricated with controlled volume reduction. Well above the polymerization threshold, the studied material exhibits remarkably low shrinkage. Therefore, no additional effort for the pre-compensation of distortion and for the improvement of structural stability is required. (C) 2009 Optical Society of America