Preparation of High-Tc Bi-Sr-Ca-Cu-O Superconducting Thin Films by AC Sputtering
Preparation of High-Tc Bi-Sr-Ca-Cu-O Superconducting Thin Films by AC Sputtering
复制标题
交流溅射制备高温Bi-Sr-Ca-Cu-O超导薄膜
DOI：
10.1143/jjap.27.l376
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发表时间：
1988
影响因子：
1.5
通讯作者：
K. Fueki
中科院分区：
文献类型：
--
作者：
H. Koinuma;M. Kawasaki;S. Nagata;K. Takeuchi;K. Fueki
采用50 Hz交流溅射法在多晶YSZ衬底上制备了Bi-Sr-Ca-Cu-O超导薄膜。在该装置中使用了一对具有各种成分的靶。在没有刻意加热的情况下沉积的膜是非晶绝缘体。当薄膜在750°C至900°C的温度范围内退火时，X射线衍射分析表明它们具有高度取向的周期性超结构，具有各种平面间距。在800°C下退火120分钟的样品的Tc（起始）和Tc（零电阻）分别为115 K和73 K。
Thin films of Bi-Sr-Ca-Cu-O superconductors were prepared on a polycrystalline YSZ substrate by the 50 Hz ac sputtering method. A pair of targets with various compositions were used in this apparatus. The films deposited without intentional heating were amorphous insulators. When the films were annealed at temperatures ranging from 750°C to 900°C, X-ray diffraction analysis showed that they had highly oriented periodic superstructures with various planar spacings. A specimen annealed at 800°C for 120 min has Tc(onset) and Tc(zero resistive) of 115 K and 73 K, respectively.