A MEMS Based Electrochemical Vibration Sensor for Seismic Motion Monitoring
A MEMS Based Electrochemical Vibration Sensor for Seismic Motion Monitoring
复制标题
用于地震运动监测的基于 MEMS 的电化学振动传感器
DOI：
10.1109/jmems.2013.2292833
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发表时间：
2014-02-01
影响因子：
2.7
通讯作者：
He, Wentao
中科院分区：
文献类型：
--
作者：
Deng, Tao;Chen, Deyong;He, Wentao
提出了一种基于微机电系统（MEMS）的电化学振动传感器。通过仿真分析了隔离层厚度对器件灵敏度的影响。然后，基于MEMS工艺制作了具有不同绝缘间隔层厚度的器件。通过定制的实验平台验证了器件的灵敏度，验证了仿真结果。此外，器件性能的特征在于0.2-5 Hz的量化带宽，灵敏度为30.2 V/（m/s2），线性电压输出作为输入振幅的函数（高达10 mg）。器械噪声在1 Hz时确定为-140 dB。在实验室环境中进行了随机振动测试，其中7个设备之间的响应相关性计算为0.976±0.017，表明设备重复性高。在地铁线路上方进行了现场测试，以检测由列车引起的地震运动，测试结果表明，所提出的设备的性能与商业产品MET-1001的性能相当。现场测试也进行了在草原监测自然地震运动和实验结果表明，所提出的电化学传感器可以检测地震运动在较低的频率域的能量峰值在0.3 Hz左右相比，传统的动圈地震传感器的能量峰值在3 Hz。这种新型的振动传感器可以作为一种很有前途的地震动探测装置，应用于需要进行低频地震动探测的地球物理勘探领域。
This paper presents a micro-electro-mechanical system (MEMS) based electrochemical vibration sensor for seismic detection. Simulations were conducted to analyze the effect of the insulating spacers thickness on the sensitivity of the devices. Then, devices with different insulating spacers thicknesses were fabricated based on MEMS processes. The devices sensitivity was confirmed by a customized experimental platform, verifying the simulation results. In addition, the device performance was characterized with a quantified bandwidth of 0.2-5 Hz with sensitivity of 30.2 V/(m/s2) and a linear voltage output as a function of the input vibration amplitude (up to 10 mg). The devices noise was determined as -140 dB at 1 Hz. A random-vibration testing in the laboratory environment was conducted, where response correlations among seven devices were calculated as 0.976±0.017, suggesting high device repeatability. A field test was conducted right above a subway line to detect the seismic motion caused by the train and test results showed that the performance of the proposed devices was comparable with that of the commercial product MET-1001. A field test was also conducted in a prairie to monitor natural seismic motions and experimental results indicated that the proposed electrochemical sensors can detect seismic motions in a lower frequency domain with an energy peak at around 0.3 Hz compared with conventional moving-coil seismic sensors with an energy peak at 3 Hz. This newly proposed vibration sensor may function as a promising seismic motion detecting device in the field of geophysical prospecting where low-frequency seismic motion detection is requested.