MINIATURE SILICON RESONANT PRESSURE SENSOR
MINIATURE SILICON RESONANT PRESSURE SENSOR
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DOI：
10.1049/ip-d.1988.0056
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发表时间：
1988-09-01
期刊：
影响因子：
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通讯作者：
SATCHELL, DW
中科院分区：
文献类型：
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作者：
GREENWOOD, JC;SATCHELL, DW
本文介绍一种性能优良的绝对气压传感器。它由一个机械谐振器组成，其谐振频率通过施加压力引起的应变而改变。有源元件由单晶硅通过微工程技术形成为一体。它具有从真空到超过1 bar（105 Pa）的压力范围，可以分辨小于1/105的满量程。
An absolute barometric pressure sensor which has shown exceptional performance is described in the paper. It consists of a mechanical resonator whose resonant frequency is changed by strain induced by applied pressure. The active element is formed in one piece, from single-crystal silicon, by microengineering techniques. It has a range from vacuum to a pressure of over 1 bar (105Pa) and can resolve less than 1 part in 105of full scale.