Development of high-accuracy x-ray ptychography apparatus
Development of high-accuracy x-ray ptychography apparatus
复制标题
高精度X射线叠层描记仪的研制
DOI：
10.1088/1742-6596/463/1/012039
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
and Y. Takahashi
中科院分区：
文献类型：
--
作者：
A. Suzuki;Y. Senba;H. Ohashi;Y. Kohmura;K. Yamauchi;T. Ishikawa;and Y. Takahashi
X射线重叠关联成像技术使我们能够在没有透镜的情况下观察非孤立物体的内部结构。我们开发了一种高精度的X射线重叠成像装置配备柯克帕特里克-贝兹镜。对于垂直和水平方向，焦点轮廓的半峰全宽约为600 nm。估计的通量约为3× 107光子/s。我们还开发了一个恒温系统，以抑制样品和/或测量过程中的光束漂移。在10小时内将装置的温度变化控制在小于0.04 ℃。10小时内的漂移总量被抑制到小于500 nm。通过采用恒温系统和漂移补偿方法，使被测物体的再现像得到明显改善。
X-ray ptychography allows us to observe the internal structures of non-isolated objects without lenses. We developed a high-accuracy X-ray ptychography apparatus equipped with Kirkpatrick-Baez mirrors. The full width at half-maximum of the focal profiles was~ 600 nm for the vertical and horizontal directions. The estimated flux was~ 3× 10 7 photons/s. We also developed a constant-temperature system to suppress sample and/or beam drift during measurements. The temperature change of the apparatus was controlled to less than 0.04 C over 10 hours. The total amount of drift over 10 hours was suppressed to less than 500 nm. By using both the constant-temperature system and a drift compensation method, the reconstructed image of the test object was markedly improved.