Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope
Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope
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DOI：
10.1093/oxfordjournals.jmicro.a023610
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发表时间：
1998-01-01
期刊：
影响因子：
--
通讯作者：
Urban, K
中科院分区：
文献类型：
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作者：
Haider, M;Rose, H;Urban, K
在一台带场发射枪的商用200千伏透射电子显微镜中，加入了一个补偿物镜球差的六极校正器。通过将仪器的分辨率极限从0.24 nm降低到约0.13 nm，成功地校正了球差。用修正后的透射电子显微镜获得的Si-SiCO_2界面图像显示，除分辨率提高外，伪影得到了显着的抑制，对比度有了很大的提高。详细介绍了校正仪的设计、对准和性能。
A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.