An introduction to terahertz time-domain spectroscopic ellipsometry
An introduction to terahertz time-domain spectroscopic ellipsometry
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DOI：
10.1063/5.0094056
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发表时间：
2022-07-01
期刊：
影响因子：
5.6
通讯作者：
Pickwell-MacPherson, E.
中科院分区：
文献类型：
--
作者：
Chen, X.;Pickwell-MacPherson, E.
在过去，太赫兹光谱学主要基于传输或窗口/棱镜支持的反射配置中的太赫兹时域光谱学系统来执行。这些传统的方法在表征不透明固体、导电薄膜、多层结构和各向异性材料方面具有局限性。椭偏测量法是一种自参考表征技术，具有广泛的适应性，几乎可以应用于所有类型的样品。然而，太赫兹椭圆偏振测量尚未得到广泛应用，这主要是因为它对光学设置提出了苛刻的要求，而且与传统的太赫兹光谱学和传统的光学椭圆偏振测量有很大的差异。在本教程中，我们从基本概念、原理、光学结构、误差校准到表征方法，介绍了太赫兹时域光谱椭圆偏振测量。作为例子，给出了不同电阻率硅片的实验结果。本教程提供了精确太赫兹时间域光谱椭圆偏振测量的关键技术指导和技巧。(C)2022年作者(S)。除另有说明外，所有文章内容均受知识共享署名(CC BY)许可证(http://creativecommons.org/licenses/by/4.0/).的许可
In the past, terahertz spectroscopy has mainly been performed based on terahertz time-domain spectroscopy systems in a transmission or a window/prism-supported reflection configuration. These conventional approaches have limitations in regard to characterizing opaque solids, conductive thin films, multiple-layer structures, and anisotropic materials. Ellipsometry is a self-reference characterization technique with a wide adaptability that can be applied for nearly all sample types. However, terahertz ellipsometry has not yet been widely applied, mainly due to the critical requirement it places on the optical setting and the large discrepancy with regard to traditional terahertz spectroscopy and conventional optical ellipsometry. In this Tutorial, we introduce terahertz time-domain spectroscopic ellipsometry from the basic concept, theory, optical configuration, error calibration to characterization methods. Experimental results on silicon wafers of different resistivities are presented as examples. This Tutorial provides key technical guidance and skills for accurate terahertz time-domain spectroscopic ellipsometry. (c) 2022 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).