Crystal Structure Analysis of Metalorganic Chemical Vapor Deposition-β-FeSi2 Thin Film by X-ray Diffraction Measurement
Crystal Structure Analysis of Metalorganic Chemical Vapor Deposition-β-FeSi2 Thin Film by X-ray Diffraction Measurement
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X射线衍射法分析金属有机化学气相沉积-β-FeSi2薄膜的晶体结构
DOI：
10.1143/jjap.42.4943
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发表时间：
2003
影响因子：
1.5
通讯作者：
H. Funakubo
中科院分区：
文献类型：
--
作者：
Takeshi Kimura;K. Akiyama;Takayuki Watanabe;K. Saito;H. Funakubo
利用高分辨X射线衍射（XRD）分析了在（111）Si衬底上生长的（101）和（110）取向β-FeSi 2外延薄膜的晶体结构。通过选择合适的衍射峰，并考虑衍射峰的强度、分辨率和衍射峰与衬底之间的间距，可以分别确定（101）和（110）取向变体的三个轴间角和三个晶格参数。利用该方法，对在（111）Si衬底上用金属有机化学气相沉积（MOCVD）方法生长的200 nm厚的（101）/（110）取向β-FeSi 2薄膜进行了分析。通过使用倾角、psi、扫描和倒易空间映射测量，发现每个（101）和（110）取向变体的轴间角几乎为90°。（101）-和（110）-取向变体的a-、B-和c-轴晶格参数组合分别为（0.9893 nm、0.7800 nm和0.7821 nm）和（0.9893 nm、0.7798 nm和0.7824 nm），由所选衍射峰测量获得，即，(406)/（460）、（533）和（800）衍射峰。这些结果表明，在该膜中没有残留大的应变。此外，根据（406）和（460）衍射峰的峰拟合，首次估算出（101）和（110）取向变体的体积分数比为45/55。
A crystal structure was analyzed for (101)- and (110)-oriented epitaxial β-FeSi2 films grown on (111)Si substrate by using high-resolution X-ray diffraction (XRD). Three interaxial angles and three-lattice parameters of (101)- and (110)-oriented variants can be individually decided by selecting the appropriate diffraction peaks taking account of the peak intensity, resolution and the interval of the peak position between the film and Si substrate. By using this method, 200-nm-thick (101)/(110)-oriented β-FeSi2 film grown on (111)Si substrate by metalorganic chemical vapor deposition (MOCVD) was analyzed. The interaxial angles of each (101)- and (110)-oriented variant were found to be almost 90° by using the inclination angle, psi, scan and the reciprocal space mapping measurement. a-, b- and c-axes lattice parameter combinations of (101)- and (110)-oriented variants were (0.9893 nm, 0.7800 nm and 0.7821 nm), and (0.9893 nm, 0.7798 nm and 0.7824 nm), respectively, obtained from the selected diffraction peaks measurement, i.e., (406)/(460), (533) and (800) diffraction peaks. These results show that large strain did not remain in this film. Moreover, the volume fraction ratio of (101)- and (110)-oriented variants was estimated for the first time to be 45/55 from the peak fitting of (406) and (460) diffraction peaks.