Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies
Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies
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DOI：
10.1109/22.859472
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发表时间：
2000-08
影响因子：
4.3
通讯作者：
J. W. Digby;C. McIntosh;G. M. Parkhurst;B. Towlson;S. Hadjiloucas;J. Bowen;J. M. Chamberlain;R. Pollard;R. Miles;D. Steenson;L. S. Karatzas;N. Cronin;S. Davies
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文献类型：
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作者：
J. W. Digby;C. McIntosh;G. M. Parkhurst;B. Towlson;S. Hadjiloucas;J. Bowen;J. M. Chamberlain;R. Pollard;R. Miles;D. Steenson;L. S. Karatzas;N. Cronin;S. Davies
本文报道了一种适用于集成化的高度减小的充气矩形波导微机械器件的制备和表征。所使用的光刻技术允许以可重复的方式成功地构建高度高达100 μ/m的结构。使用矢量网络分析仪在75-110 GHz之间的频率下进行的波导S参数测量表明TE/sub 10/模式中的低损耗传播达到每波长0.2 dB。传统的和微加工波导的扫描电子显微镜照片显示，制造技术可以提供一个上级的表面光洁度比可能与市售组件。为了克服在自由空间传播光束有效地耦合到高度减小的G波段波导中的问题，以及使用准光学技术来表征它们，已经设计和制造了一种新型的集成微机械开槽喇叭天线，E-，H-，和D-平面远场天线方向图测量在不同的频率，使用准光学装置表明，制造的结构是优化的180-GHz操作，E平面半功率波束宽度为32/spl deg/，在衬底上方升高35/spl deg/，对称H平面图案的半功率波束宽度为23/spl deg/，最大D平面交叉极化电平为-33 dB。使用HFSS的远场模式模拟与实验结果吻合良好。
The fabrication and characterization of micromachined reduced-height air-filled rectangular waveguide components suitable for integration is reported in this paper. The lithographic technique used permits structures with heights of up to 100 /spl mu/m to be successfully constructed in a repeatable manner. Waveguide S-parameter measurements at frequencies between 75-110 GHz using a vector network analyzer demonstrate low loss propagation in the TE/sub 10/ mode reaching 0.2 dB per wavelength. Scanning electron microscope photographs of conventional and micromachined waveguides show that the fabrication technique can provide a superior surface finish than possible with commercially available components. In order to circumvent problems in efficiently coupling free-space propagating beams to the reduced-height G-band waveguides, as well as to characterize them using quasi-optical techniques, a novel integrated micromachined slotted horn antenna has been designed and fabricated, E-, H-, and D-plane far-field antenna pattern measurements at different frequencies using a quasi-optical setup show that the fabricated structures are optimized for 180-GHz operation with an E-plane half-power beamwidth of 32/spl deg/ elevated 35/spl deg/ above the substrate, a symmetrical H-plane pattern with a half-power beamwidth of 23/spl deg/ and a maximum D-plane cross-polar level of -33 dB. Far-field pattern simulations using HFSS show good agreement with experimental results.