Lensless fiber-deployed low-coherence interferometer for in-situ measurements in nonideal environments
Lensless fiber-deployed low-coherence interferometer for in-situ measurements in nonideal environments
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DOI：
10.1117/1.oe.59.1.014113
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发表时间：
2020-01-01
影响因子：
1.3
通讯作者：
Kinnell, Peter
中科院分区：
文献类型：
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作者：
Hovell, Tom;Matharu, Ranveer S.;Kinnell, Peter
低相干干涉测量（LCI）是一种用于获得几何测量的成熟的光学方法，适合于在非理想环境中操作，如通过其在生物医学科学中的使用所示，其中它被称为光学相干断层扫描。然而，关于这些技术在制造领域的现场工作能力的工作尚未得到证明。这项研究的动机是需要开发能够在制造过程的恶劣环境中近实时运行的鲁棒传感器，为下一代精确和高度适应性的生产方案提供按需过程控制。一个共同的路径，无透镜，光谱域，基于LCI的传感器在空气中的台阶高度的测量和在非理想的工作环境中的水的评估证明。校准实验已经探索了在1 mm的研究轴向范围内测量的线性度，在空气中的偏差为+/-50 nm，在水中的偏差为+/-100 nm。在空气中以及将样品和传感探针浸没在水中时测量了8、7、6和5 μ m的台阶高度。两种介质中的台阶高度与制造商给出的校准规格密切一致，证明了亚微米精度和空气中+/- 56 nm和水中+/- 76 nm的精度。(C)作者。由SPIE在知识共享署名4.0未移植许可下发布。
Low-coherence interferometry (LCI) is a well-established optical method used for obtaining geometric measurements, suited for operating in nonideal environments as shown through its use in biomedical science, where it is referred to as optical coherence tomography. However, work on characterizing these technologies' ability to work in-situ within the area of manufacturing is yet to be demonstrated. This research is motivated by the need to develop robust sensors capable of operating in the harsh environment of manufacturing processes in near real-time, providing on-demand process control for the next generation of precise, and highly adaptive schemes of production. The evaluation of a common-path, lensless, spectral-domain, LCI-based sensor for measurements of step heights in air and in the nonideal operating environment of water is demonstrated. Calibration experiments have explored linearity of measurements over a 1-mm investigated axial range with deviations of the order of +/- 50 nm in air and +/- 100 nm in water. Step heights of 8, 7, 6, and 5 mu m were measured in air and also with the sample and sensing probe submerged in water. Step heights in both media closely align with calibrated specifications given by the manufacturer demonstrating submicrometer accuracy and a precision of +/- 56 nm in air and +/- 76 nm in water. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License.