A 252-V/lux.s, 16.7-Million-Frames-Per-Second 312-kpixel Back-Side-Illuminated Ultrahigh-Speed Charge-Coupled Device
A 252-V/lux.s, 16.7-Million-Frames-Per-Second 312-kpixel Back-Side-Illuminated Ultrahigh-Speed Charge-Coupled Device
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DOI：
10.1109/ted.2013.2276005
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发表时间：
2013-10-01
影响因子：
3.1
通讯作者：
Etoh, Takeharu Goji
中科院分区：
文献类型：
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作者：
Arai, Toshiki;Yonai, Jun;Etoh, Takeharu Goji
我们开发了一种 312 kpixel 背照式超高速电荷耦合器件 (CCD)，其灵敏度为 252 V/lux。 s 并能够以 16.7 Mfps 运行。像素的电位分布是通过使用 3D 半导体器件模拟器来设计的。高灵敏度源于该单元具有100%的填充因子和时间孔径比以及高光学利用率。其灵敏度是前侧照明图像传感器的12.7倍。通过原位存储图像传感器实现超高速拍摄。通过降低布线电阻并将图像区域分为八个块，获得了 16.7 Mfps 的最大帧速率。水平总像素数为 760，垂直像素数为 411。连拍速度为 5.2 Tpixel/s，使其成为迄今为止最快的成像设备。
We developed a 312-kpixel back-side-illuminated ultrahigh-speed charge-coupled device (CCD) that has a sensitivity of 252 V/lux . s and is capable of operating at 16.7 Mfps. The potential profile of the pixel was designed by using a 3-D semiconductor device simulator. The high sensitivity results from the unit having fill factor and time aperture ratios of 100% and a high optical utilization ratio. Its sensitivity is 12.7 times that of a front-side-illuminated image sensor. Ultrahigh-speed shooting was enabled by an in situ storage image sensor. By reducing the wiring resistance and dividing the image area into eight blocks, a maximum frame rate of 16.7 Mfps was attained. The total pixel count is 760 horizontally and 411 vertically. The burst capturing speed is thus 5.2 Tpixel/s, making it the fastest imaging device to date.