Structure and properties of TiSiCN coatings with different bias voltages by arc ion plating
Structure and properties of TiSiCN coatings with different bias voltages by arc ion plating
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DOI：
10.1088/2051-672x/aaa6fd
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发表时间：
2018-03
期刊：
影响因子：
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通讯作者：
Xin-Ming Xie;Jinlong Li;Minpeng Dong;Heng Zhang;Liping Wang
中科院分区：
文献类型：
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作者：
Xin-Ming Xie;Jinlong Li;Minpeng Dong;Heng Zhang;Liping Wang
采用多弧离子镀体系在316l钢表面沉积了TiSiCN涂层。所有涂层的总厚度相同，约为1.6µm。在恒流N2和恒流C2H2混合条件下制备TiSiCN涂层。通过扫描电子显微镜、x射线衍射、x射线光电子能谱、纳米压痕和球-板磨损试验对其结构、组成和性能进行了表征。结果表明，所有涂层均由TiCN纳米晶相和Si3N4非晶相组成。随着偏压的增大，膜的密度增大，具有较好的摩擦学性能和力学性能。在较高的偏置电压下制备涂层，涂层与基体之间的结合强度增加，抗热冲击能力增强。
TiSiCN coatings were deposited on 316 L steel using the multi-arc ion plating system. All the coatings had the same total thickness of approximately 1.6 µm. The TiSiCN coatings were deposited under the mixture constant flow of N2 and C2H2 but varying bias. Information about structures, composition and properties were characterized by scanning electron microscope, x-ray diffraction, x-ray photoelectron spectroscopy, nanoindentation and ball-on-plate wear tests. The results show that all of the coatings consist of a TiCN nano-crystal phase and an Si3N4 amorphous phase. With an increase in the bias, the film becomes denser and exhibits better tribological behavior and mechanical properties. Moreover, the bonding strength between the coatings and the substrate increased and the resistance to thermal shock intensified when the coatings were made at a higher bias voltage.