Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: Application to low-megahertz DC-DC converters
Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: Application to low-megahertz DC-DC converters
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DOI：
10.1109/tmag.2003.816051
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发表时间：
2003-09-01
影响因子：
2.1
通讯作者：
Allen, MG
中科院分区：
文献类型：
--
作者：
Park, JW;Allen, MG
微机械电感器亚毫米轮廓和可比的电性能，丛林，市售的表面贴装器件，已被制造和低兆赫的直流-直流转换器的特点。制造方法涉及微米级层压的Ni/Fe芯，结合三维微加工的铜绕组。所制造的电感器的磁芯具有72个1 μ m厚的Ni/Fe膜的叠层。电感器尺寸为11.5 x 5.7 x 0.7 mm，直流电阻为150 mOmega。在3 MHz处获得了M的最大Q值，电感值为2.3 μ H，直流饱和电流（I80）为0.2 A。在2.2 MHz下工作的稳压DC-DC升压转换器电路（7-12 V）中使用该电感器，在71%效率下产生1.9 W功率输出。
Micromachined inductors with submillimeter profiles and comparable electrical performance to thicket, commercially-available surface-mount devices, have been fabricated and characterized for low-megahertz dc-dc converters. The fabrication approach involves micron-scale lamination of Ni/Fe cores, combined with three-dimensional micromachined copper windings. The magnetic core of the fabricated inductor has 72 laminations of 1-mum-thick Ni/Fe films. The inductor dimension is 11.5 x 5.7 x 0.7 mm, and the dc resistance is 150 mOmega. A maximum Q of M at 3 MHz with an inductance value of 2.3 muH and a dc saturation current (I80) of 0.2 A were obtained. Use of this inductor in a regulated dc-dc boost converter circuit (7-12 V) operating at 2.2 MHz yielded 1.9-W power output at 71% efficiency.