Micromanipulation using a microcoil array
Micromanipulation using a microcoil array
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使用微线圈阵列进行显微操作
DOI：
10.1109/robot.1996.506492
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发表时间：
1996
期刊：
影响因子：
--
通讯作者：
H. Miura
中科院分区：
文献类型：
--
作者：
T. Inoue;Y. Hamasaki;I. Shimoyama;H. Miura
提出了一种利用微线圈阵列进行微操作的方法。有源线圈驱动工作平台上的永久磁铁。磁铁可以推动机械零件进行二维装配。当永磁体是闭合环空间连杆机构的一部分时，可以从2D磁体运动实现三维操作。在4 cm/spl次/4 cm线圈阵列上进行了操作测试。在此大规模实验的基础上，我们利用基于集成电路的工艺制作了微线圈阵列。制作了每线圈8圈的4/SPL时间/4微线圈阵列。包括键合焊盘在内的芯片面积为3.6 mm/SPL倍/3.6 mm。评估了吸引磁铁所需的最小电流及其速度。一个0.6 mm/spl次/0.6 mm/spl次/0.3 mm的磁体以79 mm/S的速度移动，计算了磁体沿方形轨迹运动的最高速度，结果表明，1.1 mg的磁体可以将13.4 mg的物体推出微线圈阵列。
A method of micromanipulation using a microcoil array is proposed. Active coils drive permanent magnets on a work platform. The magnets can push mechanical parts to perform 2-dimensional assembly. Three-dimensional operation may be achieved from 2D magnet motion when the permanent magnets are part of a closed loop spatial linkage. Manipulation on a 4 cm/spl times/4 cm coil array was tested. Based on this large scale experiment, we fabricated a microcoil array using IC-based processes. A 4/spl times/4 microcoil array with 8 turns per coil was fabricated. The chip area including bonding pads, is 3.6 mm/spl times/3.6 mm. The minimum current necessary to attract a magnet and its speed were evaluated. A 0.6 mm/spl times/0.6 mm/spl times/0.3 mm magnet moved at 79 mm/s. The top speed for a magnet to follow a square trajectory was evaluated, and it was demonstrated that a 1.1 mg magnet could push a 13.4 mg object out of microcoil array.