A method for calibrating the line-focus-beam acoustic microscopy system
A method for calibrating the line-focus-beam acoustic microscopy system
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一种线聚焦声学显微镜系统的校准方法
DOI：
10.1109/58.660152
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发表时间：
1998
期刊：
影响因子：
--
通讯作者：
M. Arakawa
中科院分区：
文献类型：
--
作者：
J. Kushibiki;M. Arakawa
研究了线聚焦声束（LFB）声学显微系统测量漏声表面波（LSAW）声速和衰减的绝对精度，提出了一种系统标定方法。为了讨论准确性，有必要引入一个标准样品，其体声波特性（例如，独立的弹性常数和密度）被高精度地测量。以钆镓石榴石（GGG）单晶衬底为标准样品。测量了LSAW的传播特性，并与利用体声波特性测量的计算结果进行了比较。校准演示的系统使用两个LFB声透镜设备与1毫米半径的圆柱形凹面在频率范围100至300 MHz。
Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with high accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.