Enhancement of the crystalline quality of reactively sputtered yttria-stabilized zirconia by oxidation of the metallic target surface
Enhancement of the crystalline quality of reactively sputtered yttria-stabilized zirconia by oxidation of the metallic target surface
复制标题
通过金属靶表面的氧化提高反应溅射氧化钇稳定氧化锆的结晶质量
作者：
S. Hana;K. Nishioka;and S. Horita
