Fabrication of stable metallic patterns embedded in poly(dimethylsiloxane) and model applications in non-planar electronic and lab-on-a-chip device patterning
Fabrication of stable metallic patterns embedded in poly(dimethylsiloxane) and model applications in non-planar electronic and lab-on-a-chip device patterning
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DOI：
10.1002/adfm.200400189
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发表时间：
2005-04-01
影响因子：
19
通讯作者：
Nuzzo, RG
中科院分区：
文献类型：
--
作者：
Lee, KJ;Tosser, KA;Nuzzo, RG
本文描述了嵌入在聚二甲基硅氧烷(PDMS)中的耐用金属图案的制造，并展示了它们在几个典型应用中的用途。该方法包括通过硅烷偶联剂介导的粘合化学将微米级金(和其他薄膜材料)图案转移并随后嵌入到PDMS中。我们证明该工艺适合于在PDMS上构图稳定的功能金属化结构，这些结构的限制特征尺寸小于5微米，并随后将其用作适合于软光刻构图、非平面电子学和微流控(Lab-on-a-Chip，LOC)分析系统的结构。我们特别演示了嵌入在平面和球面弯曲的PDMS衬底中的金属图案可以用作传统光刻工艺的顺应性接触光掩模。用该技术制作的非平面光掩模具有与衬底相同的表面形状，从而有利于多电平器件中结构的配准。在球面弯曲的硅单晶透镜上制作了100个金属氧化物半导体场效应晶体管(MOSFET)器件阵列的模型演示中，专门测试了这一质量。然而，这里报告的工艺最重要的机会似乎存在于分析化学的应用中，这些应用利用了使用软光刻方法制造的器件。为此，我们在PDMS上展示了适用于微流体、微分析和微电子机械系统的耐久键合金属图案。我们描述了一种多层金属电极制造方案(多层金属-绝缘体-金属(MIM)结构，显著提高了性能和稳定性)，并使用它来构建使用电化学检测的PDMS LOC器件。介绍了一种基于聚合物的微电化学分析系统，该系统包括循环伏安电极阵列和用于多巴胺和邻苯二酚的电泳式安培检测的微流控系统。
This article describes the fabrication of durable metallic patterns that are embedded in poly(dimethylsiloxane) (PDMS) and demonstrates their use in several representative applications. The method involves the transfer and subsequent embedding of micrometer-scale gold (and other thin-film material) patterns into PDMS via adhesion chemistries mediated by silane coupling agents. We demonstrate the process as a suitable method for patterning stable functional metallization structures on PDMS, ones with limiting feature sizes less than 5 mu m, and their subsequent utilization as structures suitable for use in applications ranging from soft-lithographic patterning, non-planar electronics, and microfluidic (lab-on-a-chip, LOC) analytical systems. We demonstrate specifically that metal patterns embedded in both planar and spherically curved PDMS substrates can be used as compliant contact photomasks for conventional photolithographic processes. The non-planar photomask fabricated with this technique has the same surface shape as the substrate, and thus facilitates the registration of structures in multilevel devices. This quality was specifically tested in a model demonstration in which an array of one hundred metal oxide semiconductor field-effect transistor (MOSFET) devices was fabricated on a spherically curved Si single-crystalline lens. The most significant opportunities for the processes reported here, however, appear to reside in applications in analytical chemistry that exploit devices fabricated using the methods of soft lithography. Toward this end, we demonstrate durably bonded metal patterns on PDMS that are appropriate for use in microfluidic, microanalytical, and microelectromechanical systems. We describe a multilayer metal-electrode fabrication scheme (multilaminate metal-insulator-metal (MIM) structures that substantially enhance performance and stability) and use it to enable the construction of PDMS LOC devices using electrochemical detection. A polymer-based microelectrochemical analytical system, one incorporating an electrode array for cyclic voltammetry and a microfluidic system for the electrophoretic separation of dopamine and catechol with amperometric detection, is demonstrated.