A theoretical study on Love wave sensors in a structure with multiple viscoelastic layers on a piezoelectric substrate
A theoretical study on Love wave sensors in a structure with multiple viscoelastic layers on a piezoelectric substrate
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压电基板上多层粘弹性层结构乐夫波传感器的理论研究
DOI：
10.1088/0964-1726/23/7/075015
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发表时间：
2014-07-01
影响因子：
4.1
通讯作者：
Liu, Jiansheng
中科院分区：
文献类型：
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作者：
Liu, Jiansheng
采用理论方法分析了压电基片上具有多个粘弹性波导层的乐甫波传感器的性能。该方法是基于多弹性层压电Love波的理论模型和粘弹性材料的Maxwell-Weichert模型。讨论了Love波特性与传感器性能的关系。对由粘弹性SU-8层、弹性SiO2层、ST-90°X石英衬底和两个周期为40 μm的叉指换能器（IDT）组成的Love波延迟线进行了数值计算。计算结果表明，这种两层结构的乐甫波传感器可以实现更好的性能比只有一个（粘）弹性或弹性引导层的乐甫波传感器。一些有趣的异常现象，如振荡的质量速度灵敏度（S mv），预测在该地区的尾提高发生在传播速度。在这项工作中提出的方法和数值结果可能有助于开发一个高性能的爱波传感器与多层。
A theoretical method is used to analyze the performance of Love wave sensors with multiple viscoelastic guiding layers on a piezoelectric substrate. The method is based upon the theoretical model for multi-elastic-layer piezoelectric Love waves and the Maxwell–Weichert model for viscoelastic materials. The relationship between sensor performance and the characteristics of Love waves is discussed. Numerical calculation is completed for a Love wave delay line consisting of a viscoelastic SU-8 layer, an elastic SiO2 layer, an ST-90°X quartz substrate and two interdigital transducers (IDTs) with a period of 40 μm deposited on the substrate surface. The calculated results prove that a Love wave sensor with such a two-layer structure can achieve better performance than a Love wave sensor with only one (visco)elastic or elastic guiding layer. Some interesting abnormal phenomena, such as an oscillation in mass velocity sensitivity (S mv ), are predicted at the area where tail-raising occurs in the propagation velocity. The method and the numerical results presented in this work may help in the development of a high-performing Love wave sensor with multiple layers.