Design and fabrication of micro hydrogen gas sensors using palladium thin film
Design and fabrication of micro hydrogen gas sensors using palladium thin film
复制标题
DOI：
10.1016/j.matchemphys.2012.02.002
复制
发表时间：
2012-04
影响因子：
4.6
通讯作者：
Jin-Ho Yoon;Bum-Joon Kim;Jung-Sik Kim
中科院分区：
文献类型：
--
作者：
Jin-Ho Yoon;Bum-Joon Kim;Jung-Sik Kim
采用微机电系统（MEMS）工艺设计并制作了一种高灵敏度的多层微加热型氢气传感器。传感层（Pd薄膜）通过射频（R.F.）磁控溅射采用有限元法对所设计的H2传感器的抗弯性能进行了分析。当加热器电压为3.0、3.5和4.0时，模拟数据分别为98.56、124.46和154.34°C，测量数据分别为101.28、124.20和149.42°C。在这两个数据中，微加热器的工作温度与加热器电压呈正相关。施加加热器电压后的灵敏度和响应时间的结果表明，该传感器的最佳加热器电压为4.0V。H2传感器在4.0V的加热器电压下对500ppm氢气提供0.267%的灵敏度（Rs）。气体灵敏度与氢气浓度呈正相关。
A highly sensitive hydrogen gas sensor of the multi-layer, micro heater type was designed and fabricated using a microelectromechanical system (MEMS) process. A sensing layer (Pd thin film) was fabricated by radio frequency (R.F.) magnetron sputtering. The electrothermal properties of the designed H2sensor were analyzed by the finite elements method (FEM). When the heater voltage was 3.0, 3.5 and 4.0, the simulation data were 98.56, 124.46 and 154.34°C and the measured data were 101.28, 124.20 and 149.42°C, respectively. In both data, the operating temperature of the micro heater was positively correlated with the heater voltage. The results of sensitivity and response time after application of the heater voltage demonstrated an optimal heater voltage for this sensor of 4.0V. The H2sensor provided sensitivity (Rs) of 0.267% for 500ppm – hydrogen gas at a heater voltage of 4.0V. The gas sensitivity was positively correlated with the hydrogen concentration.