Electromechanical considerations in developing low-voltage RF MEMS switches
Electromechanical considerations in developing low-voltage RF MEMS switches
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DOI：
10.1109/tmtt.2002.806514
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发表时间：
2003-01-01
影响因子：
4.3
通讯作者：
Katehi, LPB
中科院分区：
文献类型：
--
作者：
Peroulis, D;Pacheco, SP;Katehi, LPB
本文报告了用于高频应用的低驱动电压微机电系统 (MEMS) 开关的设计、制造和测试。首先介绍了低弹簧常数折叠悬挂梁的机械设计，并以低至 6 V 的测量驱动电压演示了使用这些梁的开关。此外，还解决了常见的非理想问题，例如残余面内应力和梯度应力以及下态粘滞问题，并讨论了可能的解决方案。最后，给出了这些设备动态行为的实验和理论数据。本文的结果清楚地强调了开发超低压 RF MEMS 开关需要采用集成设计方法。
This paper reports on the design, fabrication, and testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications. The mechanical design of low spring-constant folded-suspension beams is presented first, and switches using these beams are demonstrated with measured actuation voltages of as low as 6 V. Furthermore, common nonidealities such as residual in-plane and gradient stress, as well as down-state stiction problems are addressed, and possible solutions are discussed. Finally, both experimental and theoretical data for the dynamic behavior of these devices are presented. The results of this paper clearly underline the need of an integrated design approach for the development of ultra low-voltage RF MEMS switches.