Fabrication and characterization of thermally driven fast turn-on microvalve with adjustable backpressure design
Fabrication and characterization of thermally driven fast turn-on microvalve with adjustable backpressure design
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DOI：
10.1016/j.mee.2010.10.011
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发表时间：
2011-02-01
影响因子：
2.3
通讯作者：
Chou, Yu-Chin
中科院分区：
文献类型：
--
作者：
Feng, Guo-Hua;Chou, Yu-Chin
本文介绍了一种新开发的热驱动常闭微阀，具有快速开关能力和可由设计人员指定的反压阻力。该微机械阀门涉及两个关键部件：(1)具有刚度可调的上部弹性堵塞；(2)加热速度快的低三维微加热器。在驱动过程中，石蜡在微加热器内的体积膨胀形成微凸起，通过石蜡包封顶壁的孔突出。突出的微凸起解除了阀门阻塞，允许流体通过。当微加热器的电源关闭时，石蜡冷却，阀门恢复到正常关闭状态。基于25kpa背压设计，在3v或6v电池供电下，阀门在0.125 s内达到全开状态。关闭加热电源后，阀门在3.5s内恢复到全关闭状态。详细的制造，表征和讨论在文本中提出。(C) 2010 Elsevier B.V.版权所有
This paper presents a newly developed thermally driven normally-closed microvalve with fast switch-on capability and a backpressure resistance that can be specified by the designer. Two key components are involved in this micromachined valve: (1) an upper elastic blockade with stiffness adjustability; (2) a lower 3-dimensional microheater with rapid heating rate. During actuation, volume expansion of paraffin wax inside the microheater forms micro-bulges that protrude through holes in the top wall of the paraffin's encapsulation. The protruding micro-bulges lift the valve blockade, allowing fluid to pass. When power to the microheater is turned off, the paraffin cools and valve returns to its normally closed state. Based on a design capable of 25 kPa backpressure, the valve attains its fully open state within 0.125 s under either a 3 V or 6 V battery-powered supply. When heating power is turned off, the valve returns to its fully closed state within 3.5s. Details of fabrication, characterization and a discussion are presented in the text. (C) 2010 Elsevier B.V. All rights reserved.