GRAZING-INCIDENC E X-RAY DIFFRACTOMETER FOR DETERMINING IN-PLANE STRUCTURE OF THIN FILMS
GRAZING-INCIDENC E X-RAY DIFFRACTOMETER FOR DETERMINING IN-PLANE STRUCTURE OF THIN FILMS
复制标题
用于确定薄膜面内结构的掠入射 X 射线衍射仪
DOI：
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
Jimpei Harada
中科院分区：
文献类型：
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作者：
K. Omote;Jimpei Harada
最近研制了一种高强度掠入射衍射仪系统，该系统采用抛物面梯度多层膜反射镜和18千瓦的双阳极发生器，用于表面和薄膜的结构表征。它的测角仪有两个面内tp/20 x轴和两个传统的m <$20轴，分别用于测量面内和面外衍射。衍射仪可用于掠入射布拉格衍射、面内衍射和/或X射线反射率测量。对多晶钴合金薄频分复用记录介质的面内衍射分析揭示了高密度记录介质的横向结构各向异性。利用朗缪尔法在硅衬底上制备了有机硅烷单分子膜，并成功地进行了面内衍射和反射率测量。
ABSTRUCT A high-intensity grazing-incidence diffractometer system, which uses a parabolic graded multilayer mirror and an 18-kW rotating-anode generator, has recently been developed for the structural characterization of surfaces and thin film~. Its goniometer has two in-plane tp/20 x axes and two conventional m¢20 axes for measurements of in-plane and out-of-plane diffraction, respectively. The diffractometer can be used for grazing-incidence Bragg diffraction, in-plane diffraction and/or X-ray reflectivity measurements. An in-plane diffraction analysis of polycrystalline Co-alloy thin-fdm recording media reveals lateral structural anisotropy in highdensity recording media. In-plane diffraction and reflectivity measurements of an organosilane monolayer prepared by Langmuir method on a silicon substrate were also successfully made.