Compact Polarization Beam Splitter Using an Asymmetrical Mach-Zehnder Interferometer Based on Silicon-on-Insulator Waveguides
Compact Polarization Beam Splitter Using an Asymmetrical Mach-Zehnder Interferometer Based on Silicon-on-Insulator Waveguides
复制标题
使用基于绝缘体上硅波导的非对称马赫曾德干涉仪的紧凑型偏振分束器
DOI：
10.1109/lpt.2012.2184530
复制
发表时间：
2012-04-15
影响因子：
2.6
通讯作者：
Bowers, John E.
中科院分区：
文献类型：
--
作者：
Dai, Daoxin;Wang, Zhi;Bowers, John E.
实验证明了一种基于非对称马赫-曾德尔干涉仪(MZI)的紧凑型偏振分束器，它位于亚微米级的绝缘体上。目前的MZI偏振分束器(PBS)是采用双刻蚀工艺制作的，深刻蚀区域包括MZI臂和多模干涉(MMI)耦合器。这样，MZI臂的双折射和MMI耦合器的功率分束比对刻蚀深度不敏感，从而使制作变得容易。2x2 MMI耦合器被优化为对偏振不敏感，并且两种偏振具有平衡的比率(50：50)。制作的MZI PBS在1.54~1.58微米的波长范围内测得的消光比大于10分贝。
A compact polarization beam splitter based on an asymmetrical Mach-Zehnder interferometer (MZI) on a sub-micron silicon-on-insulator platform is demonstrated experimentally. The present MZI polarization beam splitter (PBS) is fabricated with a double-etching process and the deeply-etched region includes the MZI arms and the multimode-interference (MMI) couplers. In this way, the birefringence of the MZI arms and the power splitting ratio of the MMI coupler become insensitive to the etching depth, which makes the fabrication easier. The 2x2 MMI couplers are optimized to be polarization-insensitive and have a balanced ratio (50:50) for both polarizations. The measured extinction ratio of the fabricated MZI PBS is higher than 10 dB in the wavelength range from 1.54 to 1.58 mu m.