Scanning proximal probes for parallel imaging and lithography

Scanning proximal probes for parallel imaging and lithography
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扫描近端探头以进行并行成像和光刻

DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
I. Kostic
I. Kostic
中科院分区：
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文献类型：
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作者：
K. Ivanova;Y. Sarov;T. Ivanov;A. Frank;Jens;Christian Bitterlich;U. Wenzel;B. Volland;S. Klett;I. Rangelow;P. Zawierucha;M. Zielony;T. Gotszalk;D. Dontzov;W. Schott;N. Nikolov;M. Zier;B. Schmidt;W. Engl;T. Sulzbach;I. Kostic

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扫描邻近探针是分析、操作和自下而上合成的独特强大工具。一个大规模的并行微处理器探针平台的演示。讨论了128个自感知和自驱动近端探头。详细介绍了基于压阻传感器的读出和基于双压电晶片DC/AC驱动的弯曲控制。
Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated proximal probes are discussed. Readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations are described in detail.