A MEMS surface fence for wall shear stress measurement with high sensitivity
A MEMS surface fence for wall shear stress measurement with high sensitivity
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DOI：
10.1007/s00542-015-2450-6
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发表时间：
2016-02-01
影响因子：
2.1
通讯作者：
Ma, Cheng Yu
中科院分区：
文献类型：
--
作者：
Ma, Bing He;Ma, Cheng Yu
本文提出了一种用于壁面剪应力测量的高灵敏度微加工表面栅。为了改善弯曲应力，从而提高传感器的灵敏度，采用优化分析和正交试验设计的方法，对传感器悬臂梁结构（敏感元件）进行了优化设计。使用微机械加工技术制造了几个传感器，传感元件具有5 mm的宽度、20 μ m的厚度和2,200或1,700 μ m的高度。在大约+/-0.7 Pa的范围内针对普雷斯顿管的校准表明，传感器具有扩展到2.3 mV/（V中心点Pa）的灵敏度，与具有相同厚度的感测元件的先前MEMS表面栅栏相比，灵敏度至少提高13%。本文还介绍了一种声激励法来检测MEMS表面栅栏的谐振频率，其特点是与模态有限元分析相比，偏差很小。
In this paper, an optimized micro-fabricated surface fence with high sensitivity is presented for measurement of wall shear stress. In order to improve the bending stress and thereby enhance the sensitivity of the sensor, the cantilever structure of sensor (the sensing element) is designed and optimized by optimization analysis and orthogonal experimental design. Several sensors are fabricated using the micromachining technology with the sensing element having a width of 5 mm, a thickness of 20 mu m and a height of either 2,200 or 1,700 mu m. Calibration against a Preston Tube over a range of approximately +/- 0.7 Pa demonstrates that the sensors have sensitivity extended up to 2.3 mV/(V center dot Pa), at least 13 % improvement in sensitivity compared to the previous MEMS surface fence with the same thickness of sensing element. The paper also introduces an acoustic excitation method to detect the resonant frequency of the MEMS surface fence, which features a very little deviation compared with the modal FE-analysis.