Sputter deposition of ultrahard coatings within the system Ti-B-C-N
Sputter deposition of ultrahard coatings within the system Ti-B-C-N
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DOI：
10.1016/0257-8972(90)90146-4
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发表时间：
1990-06
影响因子：
5.4
通讯作者：
C. Mitterer;M. Rauter;P. Rödhammer
中科院分区：
文献类型：
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作者：
C. Mitterer;M. Rauter;P. Rödhammer
研究了源自 TiB2 的超硬（硬度大于 4000 HV 0.05）涂层作为切削工具的薄耐磨涂层。沉积方法基于采用直流电的非反应性和反应性溅射沉积。 TiB2 靶材磁控溅射。涂层沉积在钼、铌和硬质合金基材上。通过 TiB2 靶材的非反应溅射可形成具有 (001) 取向 TiB2 相的极细柱薄膜。在 Ar-N2-C3H8 气氛中反应沉积的涂层表现出非常细粒度的断裂非晶结构。在 Ar-N2 气体混合物中进行反应溅射的情况下，在低 N2 流量下会出现六方 TiB2−xNy 相。 N2 流量的增加导致基于 TiN 的附加相的形成。 Ar-C3H8 气氛中的反应沉积导致存在基于 TiB2 和 TiC 的混合相结构。在 Ar-N2-C3H8 混合物中生长的四元薄膜显示出由基于 TiB2 以及 TiC 和 TiN 的相组成的多相结构。对硬质合金刀片上 3 - 5 μm 厚的涂层进行维氏显微硬度测量，得出以下最大 HV 0.05 值：Ti-B 薄膜 4000； Ti-B-N 4800；钛-B-C 4000； Ti-B-C-N 4200。发现应力是压缩应力，值高达 4 GPa。划痕测试的结果表明附着力非常好。 Ti-B 涂层硬质合金刀片已在铝合金车削中进行了测试，取得了可喜的结果。
Ultrahard (hardness greater than 4000 HV 0.05) coatings derived from TiB2were investigated as thin, wear-protective coatings for cutting tools. Deposition methods were based on non-reactive as well as reactive sputter deposition employing d.c. magnetron sputtering from TiB2targets. Coatings were deposited onto molybdenum, niobium and cemented carbide substrates. Very fine-columned films with an (001)-oriented TiB2phase are formed by means ofnon-reactivesputtering of TiB2targets. Coatings depositedreactivelyin Ar-N2-C3H8atmospheres exhibit very fine-grained to fracture-amorphous structures. In the case ofreactivesputtering inAr-N2gas mixtures a hexagonal TiB2−xNyphase appears at low N2flows. An increase of the N2flow results in the formation of an additional phase based on TiN. Reactive deposition inAr-C3H8atmospheres leads to the existence of mixed-phase structures with phases based on TiB2and TiC. Quarternary films grown inAr-N2-C3H8mixtures show multiphase structures consisting of phases based on TiB2as well as TiC and TiN. Vickers microhardness measurements on coatings 3 - 5 μm thick on cemented carbide inserts gave the following maximum HV 0.05 values: Ti-B films 4000; Ti-B-N 4800; Ti-B-C 4000; Ti-B-C-N 4200. Stresses were found to be compressive with values up to 4 GPa. The results of scratch tests indicate very good adherence. Ti-B-coated cemented carbide inserts have been tested in the turning of aluminum alloys with promising results.