T.Kobayashi, X.C.Shan, Y.Murakoshi, R.Maeda: "A Novel Self-Sensitive SFM for Nondestructive Measurement of Tiny Vertical Surfaces with Restricted Access"Proceeding of Design, Test, Integration and Packaging of MEMS/MOEMS 2003. 286-289 (2003)
T.Kobayashi, X.C.Shan, Y.Murakoshi, R.Maeda: "A Novel Self-Sensitive SFM for Nondestructive Measurement of Tiny Vertical Surfaces with Restricted Access"Proceeding of Design, Test, Integration and Packaging of MEMS/MOEMS 2003. 286-289 (2003)
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T.Kobayashi、X.C.Shan、Y.Murakoshi、R.Maeda：“一种新颖的自敏 SFM，用于对访问受限的微小垂直表面进行无损测量”MEMS/MOEMS 设计、测试、集成和封装论文集 2003 年。286-
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