High Performance ITO Nanoparticles as Nanoink for Printing as a Substitute Process of Sputtering
High Performance ITO Nanoparticles as Nanoink for Printing as a Substitute Process of Sputtering
复制标题
DOI：
10.1557/opl.2014.693
复制
发表时间：
2014
期刊：
影响因子：
--
通讯作者：
A. Muramatsu;K. Kanie;T. Sasaki;M. Nakaya
中科院分区：
文献类型：
--
作者：
A. Muramatsu;K. Kanie;T. Sasaki;M. Nakaya
铟锡氧化物（ITO）薄膜通常采用溅射法制备，但只有20%的ITO沉积在衬底上。也就是说，约80%的ITO被沉积在远离衬底的其他地方而耗尽。回收过程是有限的，使得起始靶的约20% ITO损失而没有任何回收。即使在这一过程中已经进行了ITO的回收，我们也应该准备5倍以上的ITO靶材，明显使用ITO薄膜。如果我们将其从溅射改为印刷工艺，预计ITO使用量的减少将达到约10%。50%，考虑到通过印刷增加膜厚度。我们的目标技术还包括该项目的ITO纳米墨水。因此，单分散的ITO纳米粒子（NPs）与立方体形状的制备通过使用季铵氢氧化物辅助的金属氢氧化物有机凝胶。这些NP具有完美的尺寸均匀性和美丽的形状，以及包含Sn的完美的单晶结构。当我们尝试用ITO纳米墨水制备薄膜时，成功地制备了厚度小于200 nm的ITO纳米墨水，并且在热处理后电阻率急剧降低到1.0 × 10 - 3 Ω cm以下。还开发了GZO纳米墨水作为ITO的替代品。
Generally, indium-tin-oxides (ITO) thin film is prepared by the sputtering process with ITO target, but only 20% of ITO yielded from the target is deposited on the substrate. Namely, about 80% ITO is exhausted by the deposition elsewhere far from the substrate. The recycling process is limited so that ca 20% ITO of the starting target is lost without any recovery. Even if the recycling of ITO has been carried out in this process, we should prepare ITO target of 5 times more than apparent use of ITO on film. If we change it to printing process from the sputtering, the reduction in ITO use is expected as ca. 50%, considering the increase in film thickness by printing. Our target technology also includes ITO nanoink for the project. As a result, monodispersed ITO nanoparticles (NPs) with a cubic shape were fabricated by using quaternary ammonium hydroxide-assisted metal hydroxide organogels. These NPs have perfect uniformity in size with beautiful shape, and perfect single crystalline structure including Sn. As we were attempted to make thin film with ITO nanoink, it was successfully fabricated below 200 nm in thickness and the resistivity was drastically decreased below 1.0 x 10 -3 Ω cm after heat treatments. GZO nanoink as substitute of ITO has also been developed.