Nanometer-Order Resolution Displacement Measurement System by Air-Coupled Ultrasonic Wave Introducing Maximum Phase-Sensitivity Tuning
Nanometer-Order Resolution Displacement Measurement System by Air-Coupled Ultrasonic Wave Introducing Maximum Phase-Sensitivity Tuning
复制标题
引入最大相敏调谐的空气耦合超声波纳米级分辨率位移测量系统
DOI：
10.1143/jjap.44.4411
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发表时间：
2005
影响因子：
1.5
通讯作者：
K. Imano
中科院分区：
文献类型：
--
作者：
K. Sasaki;M. Nishihira;K. Imano
构建了一种引入超声波信号最大相位灵敏度自动调谐的改进系统，用于检测纳米级分辨率的位移。我们之前的系统中引入的多参考波的相位受到控制并适当设置以调整相位灵敏度。为了评估我们的系统，使用 40 kHz 空气耦合超声波测量高精度机械平台的位移。我们系统的相位检测分辨率比以前的系统提高了十倍以上。位移分辨率为 40 nm (λ/200,000)，可测量位移范围为 8 mm (≃λ)。
An improved system introducing an automatic tuning of the maximum phase sensitivity of ultrasonic signals is constructed for detecting displacements with a nanometer-order resolution. The phases of multiple-reference waves introduced in our previous system are controlled and appropriately set to tune the phase sensitivity. To evaluate our system, the displacement of a high-precision mechanical stage was measured using 40 kHz air-coupled ultrasonic waves. The resolution of the phase detection for our system is improved more than ten times our previous system. A resolution of 40 nm (λ/200,000) displacement has been achieved with a measurable displacement range of 8 mm (≃λ).