Experimental study on surface wrinkling of silicon monoxide film on compliant substrate under thermally induced loads
Experimental study on surface wrinkling of silicon monoxide film on compliant substrate under thermally induced loads
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热致载荷作用下柔性衬底上一氧化硅薄膜表面起皱的实验研究
DOI：
10.7567/jjap.56.066503
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发表时间：
2017
影响因子：
1.5
通讯作者：
Wang Shibin
中科院分区：
文献类型：
--
作者：
Li Chuanwei;Kong Yingxiao;Jiang Wenchong;Wang Zhiyong;Li Linan;Wang Shibin
对聚二甲基硅氧烷(PDMS)柔性衬底结构上的氧化硅薄膜起皱进行了实验研究。利用PDMS在薄膜沉积过程中的自膨胀效应，通过特制的夹具对结构施加预拉伸应变。采用激光扫描共聚焦显微镜(LSCM)系统进行实时测量。根据弹性理论，测量了氧化硅薄膜和PDMS衬底的杨氏模数。此外，还分析了温度变化对后屈曲状态下的波长、振幅等几何参数的影响。结果表明，波长相对不受热负荷的影响，而振幅对热负荷的影响更为敏感。
The wrinkling of a silicon monoxide thin film on a compliant poly(dimethylsiloxane) (PDMS) substrate structure was experimentally investigated in this study. The self-expansion effect of PDMS during film deposition was utilized to impose a pretensile strain on the structure through a specially made fixture. A laser scanning confocal microscope (LSCM) system with an in situ heating stage was employed for the real-time measurement. The Young’s modulus of the silicon monoxide thin film as well as the PDMS substrate was measured on the basis of the elasticity theory. Moreover, the effects of temperature variations on geometric parameters in the postbuckling state, such as wavelength and amplitude, were analyzed. It was proved that wavelength is relatively immune to thermal loads, while amplitude is much more sensitive.