Vertically-coupled polymer micro-ring optical resonator fabricated by combined nanoimprint and photolithography

Vertically-coupled polymer micro-ring optical resonator fabricated by combined nanoimprint and photolithography
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纳米压印与光刻相结合制备垂直耦合聚合物微环光学谐振腔

DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
Takao Tokuhara
Takao Tokuhara
中科院分区:
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文献类型:
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作者:
Tahito Aida;Takao Tokuhara

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