Volatilities of Actinide and Lanthanide N,N-Dimethylaminodiboranate Chemical Vapor Deposition Precursors: A DFT Study
Volatilities of Actinide and Lanthanide N,N-Dimethylaminodiboranate Chemical Vapor Deposition Precursors: A DFT Study
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锕系元素和镧系元素 N,N-二甲氨基二硼酸盐化学气相沉积前驱体的挥发性:DFT 研究
DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
L. Gagliardi
中科院分区:
文献类型:
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作者:
Bess Vlaisavljevich;P. Miró;Drew E Koballa;T. Todorova;Scott R. Daly;G. Girolami;C. Cramer;L. Gagliardi
N,N-Dimethylaminodiboranate complexes with praseodymium, samarium, erbium, and uranium, which are potential chemical vapor deposition precursors for the deposition of metal boride and oxide thin films, have been investigated by DFT guided by field-ionization mass spectros- copy experiments. The calculations indicate that the volatilities of these complexes are correlated with the M−H bond strengths as determined by Mayer bond order analysis. The geometries of the gas-phase monomeric, dimeric, and trimeric species seen in field-ionization mass spectroscopy experiments were identified using DFT calculations, and the relative stabilities of these oligomers were assessed to understand how the lanthanide aminodiboranates depolymerize to their respective volatile forms during sublimation.
DOI:
10.1039/b509580h
发表时间:
2006
期刊:
Dalton transactions (Cambridge, England : 2003)
影响因子:
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作者:
Mehn,MarkP;Brown,StevenD;Paine,TapanK;Brennessel,WilliamW;Cramer,ChristopherJ;Peters,JonasC;QueJr,Lawrence
通讯作者:
QueJr,Lawrence